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Turbo pump
repair:Leybold,Seiko
Seiki,Varian,Pfeiffer Balzers,Edwards,Adixen,Alcatel for use in:
Analytical Instrumentation
Electron Microscopy (SEM, TEM),
Focused Ion-beam Systems (FIB) and Surface Analysis Modern focused-beam
systems such as SEM’s, TEM’s and FIB’s utilize columns that project
electrons or ions onto microscopic samples for detailed analysis. End
users analyze all types of substances from organic compounds to
semiconductor wafers. In the Semiconductor industry, in particular, they
require more sensitivity for better sample resolution. Another key
requirement is high sample throughput in order to lower the cost of
ownership of these instruments. Based on these requirements, the demand
for high performance vacuum pumps is greater than ever. Turbo molecular
pumps are also a key component in modern focused-beam systems because
they offer fast, oil-free air evacuation of large sample chambers
(oil-free operation is a key requirement of many modern analysis
applications such as semiconductor manufacturing)
Scientific Research
A common misunderstanding is that
by this method a hypothesis can be proven or tested. Generally a
hypothesis is used to make predictions that can be tested by observing
the outcome of an experiment. If the outcome is inconsistent with the
hypothesis, then the hypothesis is rejected. However, if the outcome is
consistent with the hypothesis, the experiment is said to support the
hypothesis. This careful language is used because researchers recognize
that alternative hypotheses may also be consistent with the
observations. In this sense, a hypothesis can never be proven, but
rather only supported by surviving rounds of scientific testing and,
eventually, becoming widely thought of as true (or better, predictive),
but this is not the same as it having been proven. A useful hypothesis
allows prediction and within the accuracy of observation of the time,
the prediction will be verified. As the accuracy of observation improves
with time, the hypothesis may no longer provide an accurate prediction.
In this case a new hypothesis will arise to challenge the old, and to
the extent that the new hypothesis makes more accurate predictions than
the old, the new will supplant it.
Tool Coating
PVD coatings on cutting tools -
Saves companies billions In the areas of machining and tooling PVD
coatings are widely used to increase the life and productivity of
production cutting tools saving companies billions of dollars worldwide.
The use of PVD coatings on cutting tools saves money in three ways.
PVD coated cutting tools - Run tools faster Firstly PVD coated cutting
tools can be run faster reducing cycle times and enabling the production
of more components in less time. PVD coatings on cutting tools -
Reduce wear and pickup In metal cutting different wear processes exist
depending on the workpiece material. These wear mechanisms include
abrasive wear on the flank and clearance face of the cutting tool,
crater wear on the rake face, caused by chemical interaction between the
cut chip and the tool surface, built-up edge on the cutting edge and
depth-of-cut notching caused by abrasion by the outer edge of the chip.
None of these wear mechanisms exists in isolation however one usually
predominates. For example when cutting low-silicon aluminum a
built-up-edge is generated that affects the quality of the finished
product whereas high-silicon aluminum causes the tool to wear
predominantly due to abrasion. PVD coatings are resistant to all forms
of wear increasing the life of cutting tools reducing tool-changing
costs.
Electro-Beam Welding
The electron beam gun used in EBW
both produces the electrons and accelerates them, using a hot cathode
emitter made of tungsten that emits electrons when heated. (Steigerwald
also experimented with Tantalum filaments because of the lower work
function). The electrons are then accelerated to a hollow anode inside
the gun column by means of a high voltage differential. They pass
through the anode at high speed (approx 1/2 the speed of light) and are
then directed to the workpiece with magnetic forces resulting from
focusing and deflection coils. These components are all housed in an
electron beam gun column, in which a hard vacuum (about 0.00001 torr) is
maintained. The EBW power supply pulls a low current (usually less
than 1 A), but provides a voltage as high as 60 kV in low-voltage
machines, or 200 kV in high-voltage machines. High-voltage machines
supply a current as low as 40 mA, and can provide a weld depth-to-width
ratio of 25:1, whereas the ratio with a low-voltage machine is around
12:1. The beam power of a power supply is an indicator of its ability to
do work, and determines the power density (generally 40-4000 kW/cm² or
100-10,000 kW/in²). For the hard vacuum and soft vacuum EBW methods,
the welding chamber used must be airtight and strong enough to prevent
it from being crushed by atmospheric pressure. It must have openings so
that the workpieces can be inserted and removed, and its size must be
sufficient to hold the workpieces but not significantly larger, as
larger chambers require more time to evacuate. The chamber must also be
equipped with pumps capable of evacuating it to the desired pressure.
For a hard vacuum, a diffusion pump is necessary, while soft vacuums can
often be obtained by less costly equipment. Electron beams can also be
sent from their vacuum column through membrane or plasma window for a
short distance into the air and this is used for production welding, for
example welding the hard teeth of hack saw blades onto a tougher
backing steel. The plasma window is a relatively recent advance which
has turned this kind of EBW into a far more practical tool. Previously
the vacuum containment membranes were expensive and degraded quickly by
the constant stream of high energy electrons.
Semiconductors
The turbo pump is the critical
element in the creation of an appropriate environment in the world of
semiconductor manufacturing. In fact, as semiconductor chip geometries
continue to shrink, the reliance on turbo pump technology is the highest
it has been in the history of semiconductor manufacturing. Turbo pumps
provide unique and critical advantages in the creation of vacuum for the
manufacture of semiconductor devices.
High Energy Physics
Turbomolecular pumps are widely
used in High Energy Physics, Fusion Technology and general UHV research.
Synchrotron Light Sources, Particle Accelerator Rings, UHV Laboratory
research, and Fusion reactors need extremely clean, reliable and cost
effective HV and UHV. Maintenance-free pumps are specifically required,
because most pumps are not easily accessible. Ceramic bearing pumps,
thanks to their reduced rolling friction, low stress and high thermal
stability compared to conventional bearings, deliver longer operating
life. Ultra low vapor pressure solid lubricant eliminates the need for
maintenance and assures clean operation under any operating conditions.
Vacuum Metallurgy
The making, shaping, and treating
of metals, alloys, and intermetallic and refractory metal compounds in a
gaseous environment where the composition and partial pressures of the
various components of the gas phase are carefully controlled. In many
instances, this environment is a vacuum ranging from subatmospheric to
ultrahigh vacuum (less than 760 torr or 101 kilopascals to 10-12 torr or
10-10 pascal). In other cases, reactive gases are deliberately added to
the environment to produce the desired reactions, such as in reactive
evaporation and sputtering processes and chemical vapor depositon. The
processes in vacuum metallurgy involve liquid/solid, vapor/solid, and
vapor/liquid/solid transitions. In addition, they include testing of
metals in controlled environments. There are three basic reasons for
vacuum processing of metals: elimination of contamination from the
processing environment, reduction of the level of impurities in the
product, and deposition with a minimum of impurities. Contamination from
the processing environment includes the container for the metal and the
gas phase surrounding the metal. In the vacuum process, impurities,
particularly oxygen, nitrogen, hydrogen, and carbon, are released from
the molten metal and pumped away; and metals, alloys, and compounds are
deposited with a minimum of entrained impurities. There are numerous and
varied application areas for vacuum metallurgy including special areas
of extractive metallurgy, melting processes, casting of shaped products,
degassing of molten steel, heat treatment, surface treatment, vapor
deposition, space processing, and joining processes.
Solar Cells
Many new solar cells use
transparent thin films that are also conductors of electrical charge.
The dominant conductive thin films used in research now are transparent
conductive oxides (abbreviated "TCO"), and include fluorine-doped tin
oxide (SnO2:F, or "FTO"), doped zinc oxide (e.g.: ZnO:Al), and indium
tin oxide (abbreviated "ITO"). These conductive films are also used in
the LCD industry for flat panel displays. The dual function of a TCO
allows light to pass through a substrate window to the active
light-absorbing material beneath, and also serves as an ohmic contact to
transport photogenerated charge carriers away from that light-absorbing
material. The present TCO materials are effective for research, but
perhaps are not yet optimized for large-scale photovoltaic production.
They require very special deposition conditions at high vacuum, they can
sometimes suffer from poor mechanical strength, and most have poor
transmittance in the infrared portion of the spectrum (e.g.: ITO thin
films can also be used as infrared filters in airplane windows).
Solar Energy
Solar energy refers primarily to
the use of solar radiation for practical ends. However, all renewable
energies, other than geothermal and tidal, derive their energy from the
sun. Solar technologies are broadly characterized as either passive or
active depending on the way they capture, convert and distribute
sunlight. Active solar techniques use photovoltaic panels, pumps, and
fans to convert sunlight into useful outputs. Passive solar techniques
include selecting materials with favorable thermal properties, designing
spaces that naturally circulate air, and referencing the position of a
building to the Sun. Active solar technologies increase the supply of
energy and are considered supply side technologies, while passive solar
technologies reduce the need for alternate resources and are generally
considered demand side technologies
Thin Film
Thin films are thin material layers
ranging from fractions of a nanometre (monolayer) to several
micrometres in thickness. Electronic semiconductor devices and optical
coatings are the main applications benefiting from thin film
construction. A familiar application of thin films is the household
mirror which typically has a thin metal coating on the back of a sheet
of glass to form a reflective interface. The process of silvering was
once commonly used to produce mirrors. A very thin film coating (less
than a nanometre) is used to produce two-way mirrors. The act of
applying a thin film to a surface is thin-film deposition - any
technique for depositing a thin film of material onto a substrate or
onto previously deposited layers. The material to be deposited is
placed in an energetic, entropic environment, so that particles of
material escape its surface. Facing this source is a cooler surface
which draws energy from these particles as they arrive, allowing them to
form a solid layer. The whole system is kept in a vacuum deposition
chamber, to allow the particles to travel as freely as possible. Since
particles tend to follow a straight path, films deposited by physical
means are commonly directional, rather than conformal. Example of
physical deposition: A thermal evaporator uses an electric
resistance heater to melt the material and raise its vapor pressure to a
useful range. This is done in a high vacuum, both to allow the vapor to
reach the substrate without reacting with or scattering against other
gas-phase atoms in the chamber, and reduce the incorporation of
impurities from the residual gas in the vacuum chamber. Obviously, only
materials with a much higher vapor pressure than the heating element can
be deposited without contamination of the film. Molecular beam epitaxy
is a particular sophisticated form of thermal evaporation.
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